射出成形における微細構造体の作製

カテゴリ: 全国大会

論文No: 3-158

グループ名: 【全国大会】平成14年電気学会全国大会論文集

発行日: 2002/03/26

タイトル(英語): Microfabrication of Microstruture Object by Plastic Injection Molding

著者名: 閻松 (姫路工業大学),山田 隆史(姫路工業大学),銘苅春隆 (姫路工業大学),佐藤 憲昭(樹研工業),浅野 強(姫路工業大学),服部 正(姫路工業大学)

著者名(英語): Syou En(Himeji Institute of Technology),Takasi Yamada(Himeji Institute of Technology),Harutaka Meikari(Himeji Institute of Technology),Noriaki Satou(Juken Kougyou Co.Ltd),Tuyosi Asano(Himeji Institute of Technology),Tadasi Hattori(Himeji Institute of Technology)

キーワード: 微細構造体|射出成形条件|LIGA

要約(日本語): On the LIGA process, focusing on the economical mass production of the microstrutures, plastic injection molding is a promising technique.Plastic injection molding was conducted with a mold cavity mounting a precision Nistamper, which was fabricated by the LIGA process. Test patterns were designed to havecontinuous aspect ratio of maximum 2.5. The used molding materials were PC, PMMA, and COP (Cycloolefin Polymer) in consideration of applications to the optical, mechatronics fields. We clarified the flowing properties of molding materials through the spiral flow experiment, and predict the quantitative transferability molding conditions. Based on these experiment results, COP patterns with cross-walls were successfully fabricated.

原稿種別: 日本語

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