Resonant Inverter for Excimer Gas Discharge Lamp

カテゴリ: 全国大会

論文No: 4-009

グループ名: 【全国大会】平成14年電気学会全国大会論文集

発行日: 2002/03/26

タイトル(英語): Resonant Inverter for Excimer Gas Discharge Lamp

著者名: Oleg Koudriavtsev(山口大学),Mutsuo Nakaoka(山口大学)

著者名(英語): Oleg Koudriavtsev(Yamaguchi University Technical Faculty),Mutsuo Nakaoka(Yamaguchi University Technical Faculty)

要約(日本語): This paper presents zero-voltage switching inverter for driving an excimer gas discharge lamp. Excimer gas discharge lamp is applied for efficient ultraviolet light generation. Ultraviolet is used now widely in semiconductor manufacturing, water treatment, plastic materials development and so forth. Class D type resonant amplifying scheme applied in this inverter provides the highest energy conversion efficiency, together with stable conditions for gas discharge in the discharge tube. Due to adjusting the working frequency higher than resonant frequency of the series resonant load, zero voltage switching conditions are achieved in this scheme. Furthermore, by using the pulse density modulation power regulation strategy, output power control of this inverter can be implemented without working frequency or pulse width changing that makes working conditions of the inverter steady and provides soft-switching operation in whole range of output power.

原稿種別: 日本語

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