Dynamics of E-H Mode Transition in Atmospheric Pressure RF Inductive Discharges

カテゴリ: 全国大会

論文No: 1-120

グループ名: 【全国大会】平成15年電気学会全国大会論文集

発行日: 2003/03/17

タイトル(英語): Dynamics of E-H Mode Transition in Atmospheric Pressure RF Inductive Discharges

著者名: M.A.Razzak (名古屋大学),近藤 健二(名古屋大学),上杉 喜彦(名古屋大学),高村 秀一(名古屋大学)

著者名(英語): M.A. Razzak(Nagoya University),Kenji Kondo(Nagoya University),Yoshihiko Uesugi(Nagoya University),Shuichi Takamura(Nagoya University)

キーワード: Inductively Coupled Plasma|E-H mode transition|High pressure rf discharge|Electrostatic and electromagnetic discharge|SIT inverter power supply|Spark discharge technique

要約(日本語): Recently, attention has been renewed to investigate the dynamics of electrostatic (E) to electromagnetic (H) mode transition of high pressure Inductively Coupled Plasma (ICP). In this paper, the dynamics of E-H mode transition of high pressure (1atm) radio frequency (rf) Ar induction thermal plasma with a moderate rf power of about 3.5kW are investigated experimentally. High speed and CCD camera observations are performed to investigate the dynamics of E-H mode transition. The discharge developments are compared with that of absorbed power and plasma loading impedance. The transition parameters are measured as well.

原稿種別: 日本語

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