Efficient RF Induction Thermal Plasma Generation Using T-LCL Immittance Circuit

カテゴリ: 全国大会

論文No: 1-198

グループ名: 【全国大会】平成16年電気学会全国大会論文集

発行日: 2004/03/17

タイトル(英語): Efficient RF Induction Thermal Plasma Generation Using T-LCL Immittance Circuit

著者名: Abdur Razzak(名古屋大学),鈴木 康広(名古屋大学),高村 秀一(名古屋大学),上杉 喜彦(金沢大学)

著者名(英語): Abdur Razzak(Nagoya University),Yasuhiro Suzuki(Nagoya University),Shuichi Takamura(Nagoya University),Yoshihiko Uesugi(Kanazawa University)

キーワード: inductively coupled plasma|E-H mode transition|high pressure rf discharge|static induction transistor|immittance circuit

要約(日本語): In a typical rf induction thermal plasma, a rapid increase of the coil loading impedance is observed during the dynamic changes from electrostatic (E) to electromagnetic (H) mode, and rf coil current is dropped abruptly when the load changes from the E-to-H mode thereby decreasing the absorbed power and thus the power coupling efficiency. In order to overcome these problems, a T-LCL immittance circuit cascading with the SIT inverter power source is employed to generate high-pressure efficient Ar induction thermal plasmas.

原稿種別: 日本語

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