環境モニタリングの為の高感度NO2センサーの開発

カテゴリ: 全国大会

論文No: 3-155

グループ名: 【全国大会】平成16年電気学会全国大会論文集

発行日: 2004/03/17

タイトル(英語): Highly Sensitive NO2 Sensors for Environmental Monitoring

著者名: 史 麗琴(埼玉大学),長谷川 有貴(埼玉大学),勝部 昭明(埼玉大学),中野 守(ウチヤ,サーモスタット),中村 清純(ウチヤ,サーモスタット)

著者名(英語): Liqin Shi(saitama university),Yuki Hasegawa(saitama university),Teruaki Katsube(saitama university),Mamoru Nakano(Uchiya Thermostat Co.,Ltd),Kiyozumi Nakamura(Uchiya Thermostat Co.,Ltd)

キーワード: NO2| air pulltion| gas sensor| RF Induction Plasma Deposition| high sensitivity

要約(日本語): The work is concerned on developing highly sensitive SnO2-based sensors to monitor the environments. The sensors were fabricated with the Radio-Frequency Induction Plasma Deposition (IPD) Method. The SEM and XRD method were used to examine the effect of plasma deposition parameters and heat treatment conditions on the physical properties of the sensors, and the results showed that the microstructures of the generated sensing films could be significantly influenced by the processing parameters such as the plasma torch power and the heat treatment temperatures. Meanwhile, the sensors achieved high sensitivity to detect NO2 at a low concentration down to 20 ppb with response and recovery time less than several minutes. The sensors were sensitive enough to monitor the air pollution caused by NO2 gas.

原稿種別: 日本語

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