Design and Fabrication of Gradient Coils for Mirco-MRI

カテゴリ: 全国大会

論文No: 3-145

グループ名: 【全国大会】平成17年電気学会全国大会論文集

発行日: 2005/03/15

タイトル(英語): Design and Fabrication of Gradient Coils for Mirco-MRI

著者名: 蒋永剛 (東北大学),小野 崇人(東北大学),江刺 正喜(東北大学)

著者名(英語): Yonggang Jiang(Tohoku University),Takahito Ono(Tohoku University),Masayoshi Esashi(Tohoku University)

キーワード: micro-MRI|gradient coil|high aspect ratio

要約(日本語): In order to Increase its resolution for micro magnetic resonance imaging, a strong magnetic field gradient with a small gradient coil is required. The most effective way to obtain a higher gradient strength is to reduce the gradient coil size [3]. In this paper, the new design and fabrication of a tri-axial gradient coils for micro-MRI in living cells are reported. The gradient coils are able to produce a tri-axial magnetic field gradient up to 1000 T/m with a current of 25 A. The fabrication process includes the formation of a silicon mould by photolithography, oxidation and deep-RIE, copper wire formation by sputtering, electroplating and CMP. The impedance of z axis coil has been measured, which shows that the resistance is less than 80mΩand inductance is less than 20nH.

原稿種別: 日本語

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