R.F.プラズマ溶射による高感度ホルムアルデヒドセンサの開発

カテゴリ: 全国大会

論文No: 3-167

グループ名: 【全国大会】平成17年電気学会全国大会論文集

発行日: 2005/03/15

タイトル(英語): Highly sensitive formaldehyde sensor fabricated with R.F. induction plasma deposition method

著者名: 史麗琴 (埼玉大学),長谷川有貴 (埼玉大学),勝部昭明 (埼玉大学),中野守 (ウチヤ,サーモスタット),中村清純 (ウチヤ,サーモスタット)

キーワード: プラズマ|高感度|ホルムアルデヒド|添加物

要約(日本語): The present work is concerned on developing a high performance and reliable SnO2-based Gas Sensor for detecting typical indoor air pollutant formaldehyde (HCHO) gas. The sensors were deposited on an alumina substrate using R.F. Induction Plasma Deposition (IPD) technique, and different metallic additives were introduced to sensing films by impregnation method. The sensors showed high sensitivity to HCHO gas at an extremely low gas concentration down to 20 parts-per-billion (ppb) with quick response and recovery time at several minutes. Meanwhile, the metallic additives showed important effects on the gas-sensing properties of generated sensors.

原稿種別: 日本語

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