表面弾性波素子における動的制御法の研究

カテゴリ: 全国大会

論文No: 3-106

グループ名: 【全国大会】平成20年電気学会全国大会論文集

発行日: 2008/03/19

タイトル(英語): Active Control of Surface Acoustic Wave

著者名: 宮下雅広 (東北大学),小貫哲平 (東北大学),長澤純人 (東北大学),桑野博喜 (東北大学)

キーワード: 表面弾性波|マイクロマシニング|制御

要約(日本語): This paper reports a concept of dynamic controlling system of surface acoustic wave (SAW) by using grating structures and periodic convex structures. We fabricated grating structures between transmitting and receiving IDTs, and we found a significant result that Q-value became higher. We put a periodic convex structure on a grating structure, and we found noise level decreased. Additionally, we stressed a periodic convex structure on piezoelectric substrate. This exam intended to stress a piezoelectric substrate periodically. This time, we saw some sort of effects.

原稿種別: 日本語

PDFファイルサイズ: 1,230 Kバイト