Synthesis of nano-structured diamond-liked carbon film by pulsed electron beam in plasma focus device

カテゴリ: 全国大会

論文No: 1-174

グループ名: 【全国大会】平成21年電気学会全国大会論文集

発行日: 2009/03/15

タイトル(英語): Synthesis of nano-structured diamond-liked carbon film by pulsed electron beam in plasma focus device

著者名: 王植平 (富山大学),程東旭 (富山大学),西野 勇紀(富山大学),源明 誠(富山大学),伊藤 弘昭(富山大学),升方 勝己(富山大学)

著者名(英語): Zhiping Wang(Univeristy of Toyama),Dongxu Cheng(Univeristy of Toyama),Yuki Nishino(Univeristy of Toyama),Makoto Gemmei(Univeristy of Toyama),Hiroaki Ito(Univeristy of Toyama),Katsumi Masugata(Univeristy of Toyama)

要約(日本語): Nano-structured amorphous carbon (a-c) thin films were synthesized by intense pulsed electron beam on the glass substrate at room temperature. The preparation method and characterization data are presented. X-ray diffractometer (XRD) and Raman spectroscopy, field-emission scanning electron microscopy (SEM) and nano-indentor were used to characterize the samples obtained at different axial position of 90 mm, 130 mm, 170mm, respectively. SEM images showed that nano structure was formed in the samples. Nano-indetor indicates that the film obtained at the position of 90mm owns the highest plastic hardness.

原稿種別: 日本語

PDFファイルサイズ: 1,459 Kバイト