ひずみゲージと磁気軸受を用いたアクティブ制振に関する研究

カテゴリ: 全国大会

論文No: 4-259

グループ名: 【全国大会】平成21年電気学会全国大会論文集

発行日: 2009/03/15

タイトル(英語): A Study on Active Vibration Control Using Strain Gauge and Magnetic Bearing

著者名: 後藤 勇人(東京農工大学),涌井 伸二(東京農工大学)

著者名(英語): Goto Hayato(Tokyo University of Agriculture and Technology),Wakui Shinji(Tokyo University of Agriculture and Technology)

キーワード: ひずみゲージ|磁気軸受|ターボ分子ポンプ|アクティブ制振|フィードフォワード|マイナーループ

要約(日本語): The turbo molecular pump using the magnetic bearing has been widely used due to its excellent characteristics such as the contamination-free and the oil-free. The pumps are generally mounted on the precision apparatus as vacuum equipment. Then it is necessary to preserve the small vibration level.However, although the vibration level of TMP is negligible small, the structure having TMP vibrates itself and then the quality of producing materials is degraded. To overcome the vibration problem, this paper proposes that the TMP can be applied as a vibration suppression unit. Firstly, the control structure of TMP on the market is shown and the vibration suppression scheme is clarified.Secondly, it is shown that the bending vibration can be suppressed by driving the TMP attached to the vibration beam. Finally, it is shown Minor loop is very effective in Active Vibration Control.

原稿種別: 日本語

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