Diagnostics of Microplasma by Emission Spectroscopy for Surface Treatment of Glass

カテゴリ: 全国大会

論文No: 1-200

グループ名: 【全国大会】平成23年電気学会全国大会論文集

発行日: 2011/03/05

タイトル(英語): Diagnostics of Microplasma by Emission Spectroscopy for Surface Treatment of Glass

著者名: ブラジャンマリウス (静岡大学),梅田 暁良(静岡大学),清水 一男(静岡大学)

著者名(英語): Marius Blajan(Innovation and Joint Research Center Shizuoka University),Akira Umeda(Innovation and Joint Research Center Shizuoka University),Kazuo Shimizu(Innovation and Joint Research Center Shizuoka University)

キーワード: マイクロプラズマ|発光分析|表面処理|パルス駆動

要約(日本語): The aim of this paper is to analyze the emission spectrum of the microplasma for the surface treatment of glass. Glass’ surface was treated by the remote plasma method. Nitrogen, Ar and N2/Ar, O2/Ar mixtures were used as discharge gases. An experimental Marx generator with MOSFET switches and an AC neon transformer were used as a high voltage power supplies. Emission spectrum shown N2 SPS band, N2+ FNS band, N2 FPS band, Ar I peaks, OH peaks and O I peaks. Chemical bonding on the surface of glass was analyzed by X-ray photoelectron spectrometer.

原稿種別: 日本語

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