Influences of Air Damping in Characterizations of Capacitive Micromachined Ultrasonic Transducer in Air

カテゴリ: 全国大会

論文No: 3-134

グループ名: 【全国大会】平成23年電気学会全国大会論文集

発行日: 2011/03/05

タイトル(英語): Influences of Air Damping in Characterizations of Capacitive Micromachined Ultrasonic Transducer in Air

著者名: 車 溥相(大阪大学),李 昇穆(Ingen-MSL Inc.),金島 岳(大阪大学),奥山 雅則(大阪大学)

著者名(英語): Bu-Sang Cha(Osaka University),Seung-Mok Lee(Ingen-MSL Inc.),Takeshi Kanashima(Osaka University),Masanori Okuyama(Osaka University)

キーワード: 静電容量型超音波センサ

要約(日本語): Capacitive micromachined ultrasonic transducers (CMUTs) with a perforated membrane have been fabricated and characterized in air. Two types of the CMUT have been fabricated for the perforation ratio (Area Ratio of holes = AR) of 10% and 20%, and analyzed about electrical and mechanical characteristics. Air damping of CMUT in air causes mechanical resistance to the vibration of membrane, which significantly influences the performances of the device. We have observed the effect of air damping in characterizations of a proposed CMUT under various electrical bias-conditions and structure conditions. Damping ratio and sensitivity of CMUT devices were estimated by measuring the vibration amplitude of the membrane. The air damping effect will be discussed for the performance optimization.

原稿種別: 日本語

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