サンドイッチ構造薄膜の電気特性

カテゴリ: 全国大会

論文No: 2-152

グループ名: 【全国大会】平成25年電気学会全国大会論文集

発行日: 2013/03/05

タイトル(英語): Electrical characteristic of sandwich structured thin-film

著者名: 申 在原(東北大学),金 性勳(東北大学),枦 修一郎(東北大学),石山 和志(東北大学)

著者名(英語): Jaewon Shin(Tohoku University),Sunghoon Kim(Tohoku University),Shuichiro Hashi(Tohoku University),Kazushi Ishiyama(Tohoku University)

要約(日本語): Inducing of transverse magnetic anisotropy and control of magnetic anisotropy (Hk) are important to improve sensitivity of MI sensor due to the fact that the sensitivity has intimate relation with these parameters. In previous study, we proposed the methods to control magnetic anisotropy. In this research, we fabricated the thin-film in practice and measured the impedance variation and sensitivity. The sensitivity of this film is 46% at 205 MHz. However, according to changes in carrier frequencies, the variations of impedance had shown nonlinear results. We consider that it result from the generation of capacitance by meander pattern.

原稿種別: 日本語

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