Ruのナノ摩擦現象のTEM観測

カテゴリ: 全国大会

論文No: 3-151

グループ名: 【全国大会】平成26年電気学会全国大会論文集

発行日: 2014/03/05

タイトル(英語): TEM observation of nanoscale friction of Ru

著者名: 赤尾 拓朗(東京大学生産技術研究所),鍋屋 信介(東京大学生産技術研究所),佐藤 隆昭(東京大学生産技術研究所),藤田 博之(東京大学生産技術研究所)

著者名(英語): Takurou Akao(Institute of Industrial Science,The University of Tokyo),Shinsuke Nabeya(Institute of Industrial Science,The University of Tokyo),Takaaki Sato(Institute of Industrial Science,The University of Tokyo),Hiroyuki Fujita(Institute of Industrial Science,The University of Tokyo)

キーワード: マイクロマシン|透過型電子顕微鏡|トライボロジー|ルテニウム|ナノコンタクト

要約(日本語): Currently, multi-probe array devices have been studied actively for data storage and nano lithography. However, to make them practical, we have to elucidate three factors “ electrical contact, wear resistance, frictional force” in nanoscale. In this study, I aim to clarify the effect of friction and wear resistance. The way is observing the contacted RuO2 tips using the technique of MEMS-in-TEM in real time. In this article, I use the Ru for comparison of ruthenium dioxide. I succeeded to bring Ru tips into contact in nanoscale and observe it in real time during a tensile test. I calculated the friction force of Ru.

原稿種別: 日本語

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