Development of a Planar Type of Modulated Induction Thermal Plasma with Two Split Coils

カテゴリ: 全国大会

論文No: 1-094

グループ名: 【全国大会】平成27年電気学会全国大会論文集

発行日: 2015/03/05

タイトル(英語): Development of a Planar Type of Modulated Induction Thermal Plasma with Two Split Coils

著者名: Ｓｕａｎ　Ｔｉａｌ Ｍａｉ　Ｋａｉ(金沢大学),Hiromitsu Irie(金沢大学),Yuji Maruyama(金沢大学),Yasunori Tanaka(金沢大学),Yoshihiko Uesugi(金沢大学),Tastuo Ishijima(金沢大学),Tetsuya Yukimoto(シー・ヴィ・リサーチ),Hiroshi Kawaura(シー・ヴィ・リサーチ)

著者名(英語): Kai/Suan/Tial Mai(Kanazawa University),Hiromitsu/Irie Irie(Kanazawa University),Maruyama Yuji(Kanazawa University),Yasunori Tanaka(Kanazawa University),Yoshihiko Uesugi(Kanazawa University),Tatsuo Ishijima(Kanazawa University),Tetsuya Yukimoto(CV Research Coorporation),Hiroshi Kawaura(CV Research Coorporation)

キーワード: 熱プラズマ|発光スペクトル|変調|誘導プラズマ

要約(日本語): For a large-area materials processing, we have so far developed a planar type of induction thermal plasma system with one coil .The system uses a rectangular-quartz vessel, instead of a cylindrical tube, with an air core coil or a ferrite core coil to produce ICTP with a planar shape. We introduce a newly developed planar type of ICTP coupled with two split coils supplied by two radio frequency inverters as power sources in order to generate a wider-spread and stable ICTP. In addition, the coil current was controlled alternatively to be supplied to each coil, leading to a modulated ICTP.

原稿種別: 英語

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