Microheater for wavelength selective infrared emitter

カテゴリ: 全国大会

論文No: 3-173

グループ名: 【全国大会】平成31年電気学会全国大会論文集

発行日: 2019/03/01

タイトル(英語): Microheater for wavelength selective infrared emitter

著者名: Yen-Wei Chang(Toyota Technological Institute),Shuga Yahagi(Toyota Technological Institute),Hai Minh Nguyen(Toyota Technological Institute),Minoru Sasaki(Toyota Technological Institute)

著者名(英語): Yen-Wei Chang(Toyota Technological Institute),Shuga Yahagi(Toyota Technological Institute),Hai Minh Nguyen(Toyota Technological Institute),Minoru Sasaki(Toyota Technological Institute)

キーワード: 赤外光源,マイクロヒータ,表面プラズモン,ガスセンサ,波長選択,二酸化炭素

要約(日本語): New microheaters for the wavelength selective IR emitter is fabricated based on MEMS process. This microheater is combined with the gold grating for using the surface plasmon polariton. There is a center hole for emitting IR from the gold grating placed beneath. The zig-zag aluminum metal pattern is prepared on the thin Si membrane being supported by the bulk Si ring frames. These Si microstructures are for the thermal isolation and the mechanical rigidness. Although the present IR intensity is low, the IR emitter shows the enhancement matched around the wavelength of CO2 gas absorption (4.3μm).

原稿種別: 英語

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