高等学校における集積回路デバイスに関する教育

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2012/12/01

タイトル(英語): Creating a Curriculum for an Integrated Circuit Device at a Senior High School

著者名: 安田　倫己（静岡県立科学技術高等学校），山田　明宏（A.LSIデザイン（株）），田中　武（広島工業大学電子情報工学科）

著者名(英語): Tomomi Yasuda (Shizuoka Prefectural High School of Science and Technology), Akihiro Yamada (A.LSI design company), Takeshi Tanaka (Hiroshima Institute of Technology)

キーワード: LSI設計，LSI設計用専用CADソフトウェア，高大連携，電子顕微鏡観察，EDX分析　　LSI design，Exclusive CAD software for LSI design，high school-university cooperation，SEM，EDX analysis

要約(英語): LSI systems are used at all places in modern society. A number of different technologies are used to produce LSI systems, therefore it becomes difficult to understand these systems. The education which was consistent from an integrated circuit (IC) design to a printed circuit board mounting was mainly attained at universities and graduate schools. In this study, the training for understanding IC stacked structure and layout design was conducted on the education of a senior high school. Exclusive CAD software for LSI design, α-SX was used to IC layout design. Each Student had designed an inverter and a NAND circuit. They had designed a full adder circuit in a group. Then with public development equipment, IC chips were actually manufactured along with this layout design. Bare chips were observed with scanning electron microscope (SEM). SEM and Energy Dispersive x-ray Spectroscopy (EDX) analysis were effective to deeply understand between stacked structures and material characteristics of an IC. This project was taken as a cooperation education of a high school and a university. We showed the possibility to take in an integrated circuit structure education to one of the training subjects in a senior high school.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.132 No.12 （2012） 特集：電気電子工学関連分野における教育フロンティア

本誌掲載ページ: 1112-1117 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/132/12/132_1112/_article/-char/ja/