光化学堆積SnO2薄膜を用いた携帯式水素検出器の試作

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2013/01/01

タイトル(英語): Fabrication of Portable Hydrogen Detectors based on Photochemically Deposited SnO2 Thin Films

著者名: オ　ドンボリル（名古屋工業大学），森口　幸久（名古屋工業大学），市村　正也（名古屋工業大学）

著者名(英語): Dengbaoleer Ao (Nagoya Institute of Technology), Yukihisa Moriguchi (Nagoya Institute of Technology), Masaya Ichimura (Nagoya Institute of Technology)

キーワード: 光化学堆積（PCD）法，SnO2，水素ガスセンサ，抵抗型センサ　　photochemical deposition (PCD)，SnO2，hydrogen sensor，resistance sensor

要約(英語): A highly sensitive room temperature hydrogen sensor based on Fe-doped and undoped SnO2 films were fabricated by the photochemical deposition. For deposition of doped and undoped SnO2 films, a small amount of an aqueous solution was dropped on a glass substrate and irradiated by UV light. Pd was doped to the surface of the SnO2 thin films by a photochemical technique, and then the samples were annealed. Response of a portable-type hydrogen detector consisting of the sample and a pocket tester was investigated. The Fe-doped sample showed higher sensitivity compared with the undoped sample.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.133 No.1 （2013）

本誌掲載ページ: 28-29 p

原稿種別: 研究開発レター／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/133/1/133_28/_article/-char/ja/