キャピラリー放電を用いたDiamond-Like Carbon薄膜の成膜技術の開発（第2報）―キャピラリー放電による蒸着への放電管材質の影響―

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2013/05/01

タイトル(英語): Application of Capillary Discharge Technique for Deposition of Diamond-Like Carbon Thin Films (2nd Report)―Effect of Discharge Tube Material on Deposition using Capillary Discharge Method―

著者名: 藤井　清利（兵庫県立大学工学研究科），藤原　閲夫（兵庫県立大学工学研究科），清水　政義（清水電設工業（株）），井上　尚三（兵庫県立大学工学研究科）

著者名(英語): Kiyotoshi Fujii (Graduate School of Engineering, University of Hyogo), Etsuo Fujiwara (Graduate School of Engineering, University of Hyogo), Masayoshi Shimizu (Shimizu Densetsu Kogyo Co., Ltd.), Shozo Inoue (Graduate School of Engineering, University of Hyogo)

キーワード: キャピラリー放電，ダイヤモンドライクカーボン，DLC，ピンチ，沿面放電　　capillary discharge，diamond-like carbon，DLC，z-pinch，surface discharge

要約(英語): We have been studying the Pulsed Plasma Deposition (PPD) technique for applying diamond-like carbon film deposition. This technique is one of the applications of the capillary discharge, and the deposition process is based on an ablation. In this study, we have found that the discharge tube material affect the discharge condition and the optical emission spectrum of the plume. We have also succeeded to increase the discharge current using a earth attached to the capillary tube. This earth has been effective for stabilizing the discharge. It can be concluded that the electrical properties (dielectric constant and conductivity) and physical property (melting point) of the discharge tube affect the capillary discharge.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.133 No.5 （2013） 特集：計算電磁気学の進展とその応用

本誌掲載ページ: 293-299 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/133/5/133_293/_article/-char/ja/