リソグラフィによるステンレスマイクロコイルと網目管の製作

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2013/10/01

タイトル(英語): Fabrication of Stainless-Steel Micro-Coils and Mesh Pipes using Lithography

著者名: 坂部　展士（東京電機大学大学院），堀内　敏行（東京電機大学大学院）

著者名(英語): Hiroshi Sakabe (Graduate School of Engineering, Tokyo Denki University), Toshiyuki Horiuchi (Graduate School of Engineering, Tokyo Denki University)

キーワード: マイクロコイル，網目管，ステンレス鋼，レーザ走査リソグラフィ　　micro-coil，mesh pipe，stainless steel，laser-scan lithography

要約(英語): Precise micro-coils and mesh pipes with outer and inner diameters of 100 and 60μm were fabricated using laser-scan lithography and electrolytic etching. Non-magnetizable stainless-steel (SUS304) pipes were coated with resist films, and helical patterns were delineated using a laser-scan exposure system. Positive resist PMER P-LA900 was used for fabricating micro-coils, and negative resist PMER N-CA3000 was used for fabricating micro-mesh pipes. Mesh patterns were formed by doubly delineating helical patterns coiled in opposite directions each other. Widths of resist patterns used for fabricating mesh patterns were also controlled by stitching two helical patterns. Because space widths of coils and sizes of mesh holes became larger than space widths and hole sizes of resist patterns caused by undercut in etching process, widths of resist patterns were adjusted by considering the undercut depths. As a result, pipe specimens were suitably etched in a solution of sodium chloride and ammonium chloride in water, and micro-components with homogeneous widths were successfully fabricated.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.133 No.10 （2013） 特集：リソグラフィとその関連技術・応用技術

本誌掲載ページ: 519-525 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/133/10/133_519/_article/-char/ja/