プラズマ工学の最新動向―プラズマプロセスの赤外分光解析, グラフェン研究におけるプラズマプロセス―

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2014/01/01

タイトル(英語): Recent Trends of Plasma Engineering―Infrared Spectroscopy of Plasma Process and Plasma Processing in Graphene Research―

著者名: 篠原　正典（長崎大学大学院工学研究科），金　載浩（（独）産業技術総合研究所 エネルギー技術研究部門）

著者名(英語): Masanori Shinohara (Nagasaki University), Jaeho Kim (National Institute of Advanced Science and Technology (AIST))

キーワード: プラズマ-物質表面相互作用，多重内部反射赤外分光法，「その場」「実時間」計測，カーボンナノ材料，グラフェン　　interaction，plasma，solid surface，MIR-IRAS，“in-situ” and “real-time” measurement，carbon nanomaterial，graphene

要約(英語): We describe recent trends of plasma engineering on two topics - the infrared spectroscopy of plasma process and plasma processing technologies in graphene research. First, we show the measurement of plasma process with the infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS). This method is a very powerful tool of monitoring of plasma process, because the method has high detection sensitivity and the method can be applied to “in-situ” and “real-time” monitoring of interaction of plasma with material surface. We describe the monitoring method, acquired IR spectra and analysis methods. Second, we show plasma technologies for graphene; graphene has been considered one of key materials in a 21st century industries. For the achievement of graphene applications, various processing technologies have been required. Plasma processings are expected to become essential tools in graphene industries because they can provide answers to the requirement for low-temperature processing and the desirability of dry process.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.134 No.1 （2014） 特集：2014年 研究開発の動向と最前線

本誌掲載ページ: 41-46 p

原稿種別: 解説／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/134/1/134_41/_article/-char/ja/