ESDガンの気中放電に対する火花長の測定と検証

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2015/05/01

タイトル(英語): Measurement and Validation of Spark Length for Air Discharges of Electrostatic Generator

著者名: 高　義礼（釧路高専電子工学科），川又　憲（東北学院大学電子工学科），藤原　修（名古屋工業大学）

著者名(英語): Yoshinori Taka (Dpt. of Electronic Engineering, Kushiro National College of Technology), Ken Kawamata (Dpt. of Electronic Engineering, Tohoku Gakuin University), Osamu Fujiwara (Nagoya Institute of Technology)

キーワード: ESDガン，気中放電，火花長，測定，検証　　ESD gun，air discharge，spark length，measurement，validation

要約(英語): Electrostatic discharges (ESDs) due to the collision of charged metals cause serious malfunctions in high-tech information devices. In particular, a faster collision provides a more severe ESD event, while the mechanism has not fully been elucidated, though it has widely been accepted that the faster the approach speed is, the shorter the spark length becomes. In this study, to investigate this relation quantitatively, we developed a setup for electronically measuring a spark length in air discharges of ESD generators (ESD guns), and measured spark lengths at charge voltages from + 1 kV to + 8 kV with two average approaching speeds of 20 mm/s and 100 mm/s for slow and fast approach, respectively. Measured spark lengths were validated by comparing the calculated values from two different types of empirical formulae based on the Paschen's law and experimental results shown by other researchers. As a result, we found that spark lengths measured for fixed electrodes agreed well with one of the empirical formulae, and also that the approach speeds affect spark lengths, namely the spark length for fast approach was shorter than the one for slow approach. Furthermore the measured spark lengths were found to have the same tendency with respect to approach speeds and charge voltages as other researcher's results and our previous study.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.135 No.5 （2015） 特集：2014年環境電磁工学国際シンポジウム（EMC 2014/Tokyo）

本誌掲載ページ: 259-264 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/135/5/135_259/_article/-char/ja/