N2-O2, N2-SF6混合ガス雰囲気でのACコロナ放電型イオナイザの静電気除電特性

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2016/01/01

タイトル(英語): Electrostatic Neutralization Characteristics of an AC-corona-discharge-type Ionizer in Mixed N2-O2, N2-SF6 Atmosphere

著者名: 根本　大輔（茨城大学大学院理工学研究科応用粒子線科学専攻），Yudi Kristanto（茨城大学大学院理工学研究科応用粒子線科学専攻），賀　婉?（茨城大学大学院理工学研究科応用粒子線科学専攻），松尾　武（茨城大学大学院理工学研究科応用粒子線科学専攻），佐藤　直幸（茨城大学大学院理工学研究科応用粒子線科学専攻），岡野　一雄（職業能力開発大学校電気工学科），池畑　隆（茨城大学大学院理工学研究科応用粒子線科学専攻）

著者名(英語): Daisuke Nemoto (Institute of Applied Beam Science, Graduate School of Science & Engineering, Ibaraki University), Yudi Kristanto (Institute of Applied Beam Science, Graduate School of Science & Engineering, Ibaraki University), Wanting He (Institute of Applied Beam Science, Graduate School of Science & Engineering, Ibaraki University), Takeshi Matsuo (Institute of Applied Beam Science, Graduate School of Science & Engineering, Ibaraki University), Naoyuki Sato (Institute of Applied Beam Science, Graduate School of Science & Engineering, Ibaraki University), Kazuo Okano (Department of Electrical Engineering, The Polytechnic University), Takashi Ikehata (Institute of Applied Beam Science, Graduate School of Science & Engineering, Ibaraki University)

キーワード: 静電気除電，イオナイザ，コロナ放電，負性ガス，O2，SF6　　electrostatic neutralization，ionizer，corona discharge，electronegative gas，O2，SF6

要約(英語): We are developing an electrostatic neutralizer operating in an atmosphere without oxygen for the organic electronics fabrication industry. As a part of the study, we investigated ion generation and neutralization characteristics of an ac-corona-discharge-type ionizer in different atmospheric gases such as ambient air, pure nitrogen, mixed N2-O2 and N2-SF6 gases, with changing the partial pressure of O2 and SF6, respectively. The I-V characteristic of the emitter shows that the negative current in nitrogen gas is significantly greater than the positive one; thus the product final voltage VPF gives a significant deviation to a negative value (about -2 kV). However, by introducing SF6 gas by 0.01 %, VPF reduces to about 0 V as that in ambient air. The amount of SF6 needed to improve the ion balance is three orders of magnitude smaller than that of O2, due to higher electronic affinity that a SF6 molecule has.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.136 No.1 （2016） 特集：2016年基礎材料分野の研究開発の動向

本誌掲載ページ: 33-40 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/136/1/136_33/_article/-char/ja/