球電極間の低電圧衝突ESDに伴う過渡電界の光電界プローブによる測定波形からみた放電特性の充電電圧依存性

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2019/01/01

タイトル(英語): Charging Voltage Dependence of Discharge Characteristics seen from Measured Waveforms of Transient Electric Fields due to Collision ESD of Low Voltage between Spherical Electrodes using Optical Electric Field Probe

著者名: 川又　憲（東北学院大学情報基盤工学科），石上　忍（東北学院大学情報基盤工学科），嶺岸　茂樹（東北学院大学情報基盤工学科），高　義礼（釧路工業高等専門学校創造工学科電子工学分野），藤原　修（電気通信大学 産学官連携センター）

著者名(英語): Ken Kawamata (Department of Electronic Engineering, Tohoku Gakuin University), Shinobu Ishigami (Department of Electronic Engineering, Tohoku Gakuin University), Shigeki Minegishi (Department of Electronic Engineering, Tohoku Gakuin University), Yoshinori Taka (Department of Creativec Engineering, National Institute of Technology, Kushiro College), Osamu Fujiwara (The University of Electro-Communications)

キーワード: 球電極対，衝突ESD，過渡電界，光電界プローブ，充電電圧依存性　　spherical electrode pair，collision ESD，transient electric field，optical electric field probe，charging voltage dependence

要約(英語): Measurements of transient electric fields due to collision electrostatic discharges (ESDs) between charged spherical electrodes with a diameter of 30 mm were conducted at charge voltages from 300 V to 600 V with an optical electric field probe. The result reveals that the corrected measurement waveforms properly provide electrostatic field levels at a distance of over 25 mm away from the discharge point. It also shows that the radiated electric field peaks increase with charging voltages, which is the opposite result to the well-known findings obtained so far for the lower voltage ESD events.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.139 No.1 （2019） 特集：2019年研究開発の動向と最前線

本誌掲載ページ: 45-46 p

原稿種別: 研究開発レター／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/139/1/139_45/_article/-char/ja/