Fabrication of Meshed Pipes with a Diameter of 100 μm and a Structure Composed of Fine Slit Arrays

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2020/08/01

タイトル(英語): Fabrication of Meshed Pipes with a Diameter of 100 μm and a Structure Composed of Fine Slit Arrays

著者名: Toshiyuki Horiuchi (Tokyo Denki University), Hiroshi Takahashi (Tokyo Denki University), Hiroshi Kobayashi (Tokyo Denki University)

著者名(英語): Toshiyuki Horiuchi (Tokyo Denki University), Hiroshi Takahashi (Tokyo Denki University), Hiroshi Kobayashi (Tokyo Denki University)

キーワード: meshed pipe，laser-scan lithography，electrolytic etching，stainless-steel pipe，slit array，undercut

要約(英語): Feasibility for fabricating meshed pipes was investigated using laser-scan lithography and electrolytic etching onto stainless-steel pipes with an outer diameter of 100 μm. Such meshed pipes will be useful as needles for filtering particles and granules mixed in liquids. The meshed pipes were designed by arraying 30 slits linearly in 8 lines by a circumferential angle pitch of 45°. Each 30-slit array was alternately shifted a half pitch in the axial direction from the neighbored slit-arrays. The target sizes of slits were 50 μm wide and 100 μm long, and the designed distance between slits in the axial direction was also 100 μm. Because the slit widths and lengths were enlarged by the undercut during the etching, slit patterns were delineated by reducing the sizes to 20 μm wide and 75 μm long. As a result, etched slit patterns with mean width and length of 18.5 μm and 74.9 μm, respectively, were obtained. When 6 pipes were etched, all the slits were successfully penetrated in two pipes. Although side walls of slits were inclined and contour edges became twofold caused by the undercut, it was judged that the new fabrication method of meshed pipes is feasible for developing various functional needles.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.140 No.8 （2020） 特集：未来社会に向けた先端光応用・視覚技術

本誌掲載ページ: 383-388 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/140/8/140_383/_article/-char/ja/