インチワーム型多自由度ステージ

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2013/04/01

タイトル(英語): An Inchworm-type Multi-DOF Stage

著者名: 鳥井　昭宏（愛知工業大学工学部），山田　智弘（愛知工業大学工学部），上谷　亮介（愛知工業大学工学部），植田　明照（愛知工業大学工学部），道木　加絵（愛知工業大学工学部）

著者名(英語): Akihiro Torii (Faculty of Engineering, Aichi Institute of Technology), Tomohiro Yamada (Faculty of Engineering, Aichi Institute of Technology), Ryosuke Kamiya (Faculty of Engineering, Aichi Institute of Technology), Akiteru Ueda (Faculty of Engineering, Aichi Institute of Technology), Kae Doki (Faculty of Engineering, Aichi Institute of Technology)

キーワード: 多自由度アクチュエータ，インチワーム，スチュワートプラットフォーム，圧電素子　　multi-DOF actuator，inchworm，Stewart-platform，piezoelectric actuator

要約(英語): This paper describes an inchworm-type multi-degree-of-freedom stage, which consists of a platform, linear links and a base. The stage is based on a self-propelled Stewart-platform. We use six stacked-type piezoelectric actuators as the linear links. Six electromagnets are used in the stage. The electromagnets connect the linear links to the base and to the platform. This structure enables the Stewart-platfom to move on a surface by using the principle of an inchworm. The platform supported by the linear links is also operated by the principle of an inchworm, which enables the platform to rotate in the tilt directions. While the electromagnets fix the linear actuators on the base, the platform of the proposed stage realizes a precise multi-DOF motion. Design, principle, and control signals are described. The position and orientation of the moving platform is measured, and some experimental results indicate the feasibility of the proposed stage. The mechanism is effective for a precise positioning system which has a wide working area.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.133 No.4 （2013） 特集：新たなサービス社会に貢献する情報・システム技術

本誌掲載ページ: 849-855 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/133/4/133_849/_article/-char/ja/