光電子およびNEXAFS分光法によるフッ素含有自己組織化膜の評価

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2014/04/01

タイトル(英語): Evaluation of Fluorinated Self-assembled Monolayer by Using Photoelectron and Near Edge X-ray Absorption Fine Structure Spectroscopies

著者名: 春山　雄一（兵庫県立大学 高度産業科学技術研究所／（独）科学技術振興機構, CREST），岡田　真（兵庫県立大学 高度産業科学技術研究所／（独）科学技術振興機構, CREST），中井　康喜（兵庫県立大学 高度産業科学技術研究所／（独）科学技術振興機構, CREST），石田　敬雄（産業技術総合研究所 ナノシステム研究部門），松井　真二（兵庫県立大学 高度産業科学技術研究所／（独）科学技術振興機構, CREST）

著者名(英語): Yuichi Haruyama (Laboratory of Advanced Science and Technology for Industry, University of Hyogo/Japan Science and Technology Agency, CREST), Makoto Okada (Laboratory of Advanced Science and Technology for Industry, University of Hyogo/Japan Science and Technology Agency, CREST), Yasuki Nakai (Laboratory of Advanced Science and Technology for Industry, University of Hyogo/Japan Science and Technology Agency, CREST), Takao Ishida (National Institute of Advanced Industrial Science and Technology), Shinji Matsui (Laboratory of Advanced Science and Technology for Industry, University of Hyogo/Japan Science and Technology Agency, CREST)

キーワード: フッ素含有自己組織化膜，F-SAM，FAS，光電子分光，吸収端近傍X線吸収微細構造　　Fluorinated self-assembled monolayer，F-SAM，FAS，Photoelectron spectroscopy，NEXAFS

要約(英語): The electronic structure of fluorinated self-assembled monolayers (F-SAMs) with different chain length was investigated by the using photoelectron and near edge X-ray absorption fine structure (NEXAFS) spectroscopies. From the measurements of the photoelectron spectra in the wide region and in the C 1s core-level region, chemical compositions and components of the F-SAMs with different chain length were clarified. In the C K-edge NEXAFS spectra of the F-SAMs, the several spectral features were observed and the intensity of the features at 292 and 299 eV decreased with increasing the incidence angle of the excitation photon. Based on the results of the photoelectron and NEXAFS spectra measurements, the electronic structure of four kinds of F-SAMs with different chain length is discussed.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.134 No.4 （2014） 特集：量子ビームによるナノバイオ物理応用技術

本誌掲載ページ: 468-472 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/134/4/134_468/_article/-char/ja/