ルールベース型欠陥分類器の判定パラメータ自動調整技術

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2015/04/01

タイトル(英語): A Technique of Automatically Tuning Decision Parameters for Rule-based Defect Classifier

著者名: 宮本　敦（（株）日立製作所 横浜研究所），中平　健治（（株）日立製作所 横浜研究所）

著者名(英語): Atsushi Miyamoto (Hitachi, Ltd., Yokohama Research Laboratory), Kenji Nakahira (Hitachi, Ltd., Yokohama Research Laboratory)

キーワード: SEM，半導体，欠陥分類，パラメータ調整，粗密探索　　SEM，Semiconductor，Defect classification，Parameter tuning，Coarse-to-fine search

要約(英語): In automatic defect classification of semiconductor wafers using SEM images, we propose a technique of tuning decision parameters for rule-based defect classifier. The proposed method adopts a coarse-to-fine search for reduction in processing time. However, due to a search leakage, there is no guarantee that the same solutions as a full parameter search can be obtained. In order to prevent the leakage in the coarse search theoretically, the proposed method evaluates a candidate of parameter set based on estimated range of classification accuracy attained by not only the candidate but the surrounding solutions eliminated by the coarse search. The experiments on real image data demonstrate the effectiveness of the proposed method. The proposed method can extract the same solutions as the full parameter search within almost the same processing time as the conventional coarse-to-fine search. When the sampling step of the coarse search is three to six, while the tuning time of the conventional coarse-to-fine search is 1 to 21 seconds, that of the proposed method is 5 to 35 seconds.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.135 No.4 （2015） 特集：知覚情報技術の最前線

本誌掲載ページ: 453-461 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/135/4/135_453/_article/-char/ja/