真空紫外光照射によって誘起されるPMMAの光脱離過程

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2020/07/01

タイトル(英語): Photon-stimulated Desorption Processes of Polymethylmethacrylate by Vacuum Ultraviolet Irradiations

著者名: 松本　和也（宮崎大学 工学部），小川　祐哉（宮崎大学 工学部），渕上　一輝（宮崎大学 工学部），加来　昌典（宮崎大学 工学部）

著者名(英語): Kazuya Matsumoto (University of Miyazaki), Yuya Ogawa (University of Miyazaki), Kazuki Fuchigami (University of Miyazaki), Masanori Kaku (University of Miyazaki)

キーワード: 真空紫外光，光脱離現象，アクリル　　vacuum ultraviolet (VUV)，photon-stimulated desorption，polymethylmethacrylate

要約(英語): We report on investigation of photon-stimulated desorption processes of polymethylmethacrylate (PMMA) induced by vacuum ultraviolet (VUV) irradiations. Atoms or molecules on PMMA surfaces were to be desorbed and dissociated as a result of absorption of the wavelength-selected VUV photons. Desorbed and dissociated atoms or molecules were then detected by a mass spectrometer which were obtained as a function of the irradiation wavelength. Desorption species with mass number of 28, 29, and 30 were detected at center wavelength of around 160-170 nm, which were identified as CO, CHO, and C2H6, respectively. These photon-stimulated desorption processes of PMMA depend on bond energy or molecular structure.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.140 No.7 （2020） 特集：2019年電子・情報・システム部門大会

本誌掲載ページ: 862-866 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/140/7/140_862/_article/-char/ja/