ZnO/Sr3Al2O6多層薄膜溶解を用いた六方晶系材料の転写プロセス開拓
ZnO/Sr3Al2O6多層薄膜溶解を用いた六方晶系材料の転写プロセス開拓
カテゴリ: 論文誌(論文単位)
グループ名: 【C】電子・情報・システム部門
発行日: 2024/11/01
タイトル(英語): Transfer Processes of Hexagonal Crystal systems Utilizing Dissolution of ZnO/Sr3Al2O6 Multilayer
著者名: 小田 裕也(近畿大学大学院生物理工学研究科),西川 博昭(近畿大学生物理工学部)
著者名(英語): Yuya Oda (Graduate School of Biology-Oriented Science and Technology, Kindai University), Hiroaki Nishikawa (Faculty of Biology-Oriented Science and Technology, Kindai University)
キーワード: 六方晶系材料,転写プロセス,フレキシブル薄膜,ZnO,Sr3Al2O6 hexagonal crystal system,transfer process,flexible thin film,ZnO,Sr3Al2O6
要約(英語): We have investigated a transfer process for fabricating flexible thin films of hexagonal crystal systems. In this report, we proposed a transfer process utilizing the dissolution of ZnO and Sr3Al2O6 (SAO) multilayer, such as hydroxyapatite, on a flexible polymeric sheet. The diffraction peaks of both ZnO and SAO were clearly observed in the fabricated samples, while only the ZnO diffraction peaks were detected in the samples lifted-off from the original substrate. Furthermore, immersing the samples in a mixture of 60 vol.% methanol and 40 vol.% acetylacetone, which dissolves ZnO, resulted in the disappearance of ZnO diffraction peaks. This result indicates that the proposed process of dissolving ZnO/SAO multilayers is practical for the transfer of hexagonal crystal systems.
本誌: 電気学会論文誌C(電子・情報・システム部門誌) Vol.144 No.11 (2024) 特集Ⅰ:電気関係学会関西連合大会 特集Ⅱ:電子材料関連技術の最近の進展
本誌掲載ページ: 1082-1085 p
原稿種別: 論文/日本語
電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/144/11/144_1082/_article/-char/ja/
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