超精密ステージにおけるオイラーの運動方程式と物体座標系の回転の非線形性と軸間干渉を補償した姿勢制御法

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門

発行日: 2014/03/01

タイトル(英語): Attitude Control Method for High-Precision Stage by Compensating for Nonlinearity and Coupling Arising from Euler's Equation and Coordinate Rotation

著者名: 大西　亘（東京大学大学院新領域創成科学研究科），藤本　博志（東京大学大学院新領域創成科学研究科），堀　洋一（東京大学大学院新領域創成科学研究科），坂田　晃一（（株）ニコン），鈴木　一弘（（株）ニコン），佐伯　和明（（株）ニコン）

著者名(英語): Wataru Ohnishi (Graduate School of Frontier Sciences, The University of Tokyo), Hiroshi Fujimoto (Graduate School of Frontier Sciences, The University of Tokyo), Yoichi Hori (Graduate School of Frontier Sciences, The University of Tokyo), Koichi Sakata (Nikon Corporation), Kazuhiro Suzuki (Nikon Corporation), Kazuaki Saiki (Nikon Corporation)

キーワード: 姿勢制御，オイラーの運動方程式，運動学，非線形性，非干渉化，モーションコントロール　　attitude control，Euler's equation，rotational kinematics，nonlinearity，decoupling，motion control

要約(英語): High-precision stages are implemented in the manufacturing processes for electronic devices such as integrated circuits and liquid crystal displays. The development of electronic equipment manufacturing industry requires increasingly higher levels of integration density; hence, not only stage position but also the stage attitude needs to be controlled rapidly and precisely. The attitude is determined on the basis of roll, pitch, and yaw motions, which are affected by the nonlinearity and coupling arising from Euler's equation and coordinate rotation. These effects degrade the attitude control performance. This paper proposes a multi-input multi-output nonlinear feedforward attitude controller which compensates for these effects. The effectiveness of the proposed approach is verified through simulations and experiments.

本誌: 電気学会論文誌D（産業応用部門誌） Vol.134 No.3 （2014） 特集：産業計測自動制御，メカトロニクス制御

本誌掲載ページ: 293-300 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejias/134/3/134_293/_article/-char/ja/