粗微動間連結分離機構を有する精密位置決めステージの終端状態制御法を用いた整定時間短縮法

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門

発行日: 2015/03/01

タイトル(英語): Method to Shorten Settling Time Using Final State Control for High-Precision Stage with Decouplable Structure of Fine and Coarse Parts

著者名: 矢崎　雄馬（東京大学大学院新領域創成科学研究科），藤本　博志（東京大学大学院新領域創成科学研究科），堀　洋一（東京大学大学院新領域創成科学研究科），坂田　晃一（（株）ニコン），原　篤史（（株）ニコン），佐伯　和明（（株）ニコン）

著者名(英語): Yuma Yazaki (Graduate School of Frontier Sciences, The University of Tokyo), Hiroshi Fujimoto (Graduate School of Frontier Sciences, The University of Tokyo), Yoichi Hori (Graduate School of Frontier Sciences, The University of Tokyo), Koichi Sakata (Nikon Corporation), Atsushi Hara (Nikon Corporation), Kazuaki Saiki (Nikon Corporation)

キーワード: 精密位置決め，精密位置決めステージ，2段アクチュエータ，整定時間短縮，終端状態制御法　　Precise Positioning，High Precision Stage，Dual Stage，Settling Time Shortening，Final State Control

要約(英語): High-precision stages require high-speed and high-precision control to improve their production throughput and quality. However, their motion speed and accuracy are expected to reach a limit in the near future if the conventional high-precision stage structure is used. Therefore, the authors designed and fabricated a ‘catapult stage’ which has a structure that can be decoupled into a fine stage and coarse stage. The catapult stage is different from conventional dual stages where the fine stage is disturbed by the coarse stage because they contact each other. This paper proposes a novel control system design for the catapult stage and a control method that shortens the settling time using final state control (FSC). So far, FSC has mainly been used for applications such as hard disk drives for which the initial states are zero. However, it is important to consider the initial states for the catapult stage because the initial position, velocity and acceleration of the catapult stage are not equal to zero. Simulations and experiments were performed to demonstrate the effectiveness of the proposed methods.

本誌: 電気学会論文誌D（産業応用部門誌） Vol.135 No.3 （2015） 特集：産業計測制御，メカトロニクス制御

本誌掲載ページ: 227-236 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejias/135/3/135_227/_article/-char/ja/