Decoupling Control Method for High-Precision Stages using Multiple Actuators considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation
Decoupling Control Method for High-Precision Stages using Multiple Actuators considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation
カテゴリ: 論文誌(論文単位)
グループ名: 【D】産業応用部門(英文)
発行日: 2016/03/01
タイトル(英語): Decoupling Control Method for High-Precision Stages using Multiple Actuators considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation
著者名: Wataru Ohnishi (The University of Tokyo), Hiroshi Fujimoto (The University of Tokyo), Koichi Sakata (Nikon Corporation), Kazuhiro Suzuki (Nikon Corporation), Kazuaki Saiki (Nikon Corporation)
著者名(英語): Wataru Ohnishi (The University of Tokyo), Hiroshi Fujimoto (The University of Tokyo), Koichi Sakata (Nikon Corporation), Kazuhiro Suzuki (Nikon Corporation), Kazuaki Saiki (Nikon Corporation)
キーワード: multiple actuator,decoupling control,integrated design of mechanism and control,high-precision stage
要約(英語): High-precision stages are widely used in the semiconductor and flat panel industries. Because six degrees of freedom have to be controlled in these stages, coupling forces can degrade their control performance and stability. This paper proposes a decoupling control method from the scanning motion x to the pithing motion θy using multiple actuators considering the misalignment of the actuation point, the center of gravity (CoG), and the center of rotation (CoR). The method proposed in this paper consists of three steps: 1) a detailed modeling of the the scanning motion x and the pitching motion θy, 2) a changeable actuation point stage, and 3) an integrated design of mechanism and control. The validity of the proposed method is demonstrated by experiments.
本誌掲載ページ: 141-147 p
原稿種別: 論文/英語
電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejjia/5/2/5_141/_article/-char/ja/
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