高温環境で用いるための雑音振動を利用した確率型MEMSセンサ

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2011/05/01

タイトル(英語): Stochastic Counting MEMS Sensor Using White Noise Oscillation for High Temperature Environment

著者名: 畠山　庸平（東北大学　大学院工学研究科），江刺　正喜（東北大学　原子分子材料科学高等研究機構），田中　秀治（東北大学　大学院工学研究科）

著者名(英語): Yohei Hatakeyama (Graduate School of Engineering, Tohoku University), Masayoshi Esashi (WPI Advanced Institute for Materials Research, Tohoku University), Shuji Tanaka (Graduate School of Engineering, Tohoku University)

キーワード: 確率型センサ，歪測定，プルイン，ホワイトノイズ　　stochastic sensor，strain sensing，pull-in，white noise

要約(英語): This paper describes a stochastic counting MEMS sensor, which will be used in low S/N environments like in high temperature plants. A mass which vibrates between two counter electrodes by white voltage noise is “pulled-in” to either of the electrodes by the application of pulse voltage to the mass. The direction of the pull-in is determined stochastically, and the probability that the mass is pulled-in to a particular side depends on mechanical strain applied to the sensor structure. This sensing principle was confirmed by simulation, and then the sensor was prototyped using an SOI wafer. The probability of pull-in to a particular side was tuned by bias voltage applied to the counter electrodes, as predicted by the simulation. When the frequency of the pulse voltage for pull-in increases, the behavior of the sensor becomes unintended, because the mass is pulled-in during dumping vibration after releasing from the previous pull-in. This limits the sensing speed, but strain sensing is possible just counting the number of pull-in to a particular side, which is easy even in low S/N environments.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.131 No.5 （2011）

本誌掲載ページ: 178-184 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/131/5/131_5_178/_article/-char/ja/