A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2011/05/01

タイトル(英語): A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal

著者名: Meng Zhao（The Graduate School of Information, Production and Systems, Waseda University），Jiani Wang（The Graduate School of Information, Production and Systems, Waseda University），Hiroshi Oigawa（The Graduate School of Information, Production and Systems, Waseda University），Jing Ji（The Graduate School of Information, Production and Systems, Waseda University），Hisanori Hayashi（The Graduate School of Information, Production and Systems, Waseda University），Toshitsugu Ueda（The Graduate School of Information, Production and Systems, Waseda University）

著者名(英語): Meng Zhao (The Graduate School of Information, Production and Systems, Waseda University), Jiani Wang (The Graduate School of Information, Production and Systems, Waseda University), Hiroshi Oigawa (The Graduate School of Information, Production and Systems, Waseda University), Jing Ji (The Graduate School of Information, Production and Systems, Waseda University), Hisanori Hayashi (The Graduate School of Information, Production and Systems, Waseda University), Toshitsugu Ueda (The Graduate School of Information, Production and Systems, Waseda University)

キーワード: micromaching，anisotropic etching，quartz crystal

要約(英語): We developed an anisotropic wet etching simulator that can predict the etching profile of initial shape, which is two-dimensional and formed by straight lines. New etching rate database of quartz at a special condition was obtained. Improved hull method was used to deal with round corner etching. New programming flow was adopted to avoid improper profile prediction. A friendly graphical user interface was built for user's convenience. The simulation result of this simulator meets well with the experimental results and shows nice accuracy in new emerging faces predicting.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.131 No.5 （2011）

本誌掲載ページ: 185-188 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/131/5/131_5_185/_article/-char/ja/