Modeling and Experimental Analysis on the Nonlinearity of Single Crystal Silicon Cantilevered Microstructures

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2011/05/01

タイトル(英語): Modeling and Experimental Analysis on the Nonlinearity of Single Crystal Silicon Cantilevered Microstructures

著者名: Yonggang Jiang（Japan Science and Technology Agency），Masayoshi Esashi（The World Premier International Research Center, Advanced Institute for Materials Research, Tohoku University），Takahito Ono（Graduate School of Engineering, Tohoku University）

著者名(英語): Yonggang Jiang (Japan Science and Technology Agency), Masayoshi Esashi (The World Premier International Research Center, Advanced Institute for Materials Research, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku University)

キーワード: microcantilever，nonlinearity，softening-spring effect

要約(英語): Single crystal silicon microcantilevers with different supporting properties are fabricated for nonlinearity analysis. Using a modeling method, the frequency responses of the microcantilevers are fitted and their nonlinearity parameters are calculated. It is found that the nonlinearity parameter decreases by increasing the length of the cantilever. For the cantilever with same length, narrow cantilevers have smaller nonlinearity parameters. Microcantilevers with a “soft” supporting plate are more susceptible to nonlinear behavior, and the nonlinear parameter increases by increasing the length of the “soft” supporting plate.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.131 No.5 （2011）

本誌掲載ページ: 195-196 p

原稿種別: 研究開発レター／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/131/5/131_5_195/_article/-char/ja/