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Buckling Control of Silicon Dioxide Diaphragms for Sensitivity Enhancement of Piezoelectric Ultrasonic Microsensors

Buckling Control of Silicon Dioxide Diaphragms for Sensitivity Enhancement of Piezoelectric Ultrasonic Microsensors

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カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2011/07/01

タイトル(英語): Buckling Control of Silicon Dioxide Diaphragms for Sensitivity Enhancement of Piezoelectric Ultrasonic Microsensors

著者名: Kaoru Yamashita (Kyoto Institute of Technology), Tomoya Yoshizaki (Osaka University), Minoru Noda (Kyoto Institute of Technology), Masanori Okuyama (Osaka University)

著者名(英語): Kaoru Yamashita (Kyoto Institute of Technology), Tomoya Yoshizaki (Osaka University), Minoru Noda (Kyoto Institute of Technology), Masanori Okuyama (Osaka University)

キーワード: ultrasonic sensor,sensitivity,piezoelectric,diaphragm,deflection,silicon dioxide

要約(英語): Piezoelectric ultrasonic microsensors have been fabricated on buckling-controlled silicon dioxide diaphragms for sensitivity enhancement. A precise stress control process has been developed for fragile SiO2 diaphragms, which are derived from a surface oxidized normal silicon wafer, to allow spontaneous buckling and to make re-buckle upward. The fabricated sensors on upward- and downward-buckled SiO2 diaphragms have been evaluated in terms of static deflection and sensitivity. The upward-buckled diaphragms show the deflection around +4.8μm while the downward ones show that around -3.5μm. Totally a four times higher sensitivity is obtained on average of forty sensors in the comparison of the upward diaphragm sensors to the downward ones.

本誌: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.131 No.7 (2011)

本誌掲載ページ: 235-239 p

原稿種別: 論文/英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/131/7/131_7_235/_article/-char/ja/

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