Nanostrain Sensing Based on Piezo-Optic Property of a Photonic Crystal Cavity

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2011/07/01

タイトル(英語): Nanostrain Sensing Based on Piezo-Optic Property of a Photonic Crystal Cavity

著者名: Bui Thanh Tung (Ritsumeikan University), Dzung Viet Dao (Ritsumeikan University), Susumu Sugiyama (Ritsumeikan University)

著者名(英語): Bui Thanh Tung (Ritsumeikan University), Dzung Viet Dao (Ritsumeikan University), Susumu Sugiyama (Ritsumeikan University)

キーワード: Strain sensing，photonic crystal，optical resonator，FDTD

要約(英語): This paper reports the theoretical and experimental investigations of the strain sensitive effect of a 2-D photonic crystal (PhC) cavity for strain sensing applications. Strain sensitivity of a high quality factor PhC cavity is studied based on finite element method (FEM) and finite difference time domain (FDTD) simulations. The results show that the resonant wavelength of cavity is proportional to the application of strain. Linear relationships between strain applied and shift of resonant wavelength were obtained. Thus, it is possible to detect the strain by determining resonant wavelength shift. The test device was fabricated using micromachining for experimental investigation. The sensitivity to longitudinal strains was determined to be 0. 95 pm/μ-strain.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.131 No.7 （2011）

本誌掲載ページ: 258-263 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/131/7/131_7_258/_article/-char/ja/