赤外線吸収式マルチガスセンサ

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2011/07/01

タイトル(英語): Infrared Absorption Sensor for Multiple Gas Sensing

著者名: 榎本　哲也（（株）デンソー　基礎研究所），鈴木　愛美（（株）デンソー　基礎研究所），岩城　隆雄（（株）デンソー　基礎研究所），和戸　弘幸（（株）デンソー　基礎研究所），竹内　幸裕（（株）デンソー　基礎研究所）

著者名(英語): Tetsuya Enomoto (Research Laboratories, DENSO CORPORATION), Megumi Suzuki (Research Laboratories, DENSO CORPORATION), Takao Iwaki (Research Laboratories, DENSO CORPORATION), Hiroyuki Wado (Research Laboratories, DENSO CORPORATION), Yukihiro Takeuchi (Research Laboratories, DENSO CORPORATION)

キーワード: ガスセンサ，ファブリペロー分光器，MEMS，ポリシリコン　　Gas sensor，Fabry-Perot spectrometer，MEMS，polysilicon

要約(英語): We report on a novel MEMS (Micro Electro Mechanical Systems) based Fabry-Perot spectrometer with ultra wide wavelength range (3.2-8.4 μm) compared to the previously reported ones (typically 2.8-5.8 μm). The wavelength range of a Fabry-Perot spectrometer is known to increase by increasing the ratio of the refractive indexes of the multilayer mirrors. Thus, a novel mirror structure was proposed replacing low refractive index layer of SiO2 (nL=1.44) by “air (nL=1)” for wider wavelength range. The proposed device was fabricated by HF sacrificial layer etching of SiO2 between four ultra-thin polysilicon films (ca. 320 nm). The following two ideas were adopted to fabricate this delicate structure properly. (1) Electrostatic force was generated only in the outer region surrounding the air mirror not to deform the mirror. (2) Supercritical drying process was employed after the sacrificial etching to prevent the possible sticking issue.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.131 No.7 （2011）

本誌掲載ページ: 264-269 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/131/7/131_7_264/_article/-char/ja/