Design Issues for Piezoresistive Nanocantilever Sensors with Non-uniform Nanoscale Doping Profiles

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2011/07/01

タイトル(英語): Design Issues for Piezoresistive Nanocantilever Sensors with Non-uniform Nanoscale Doping Profiles

著者名: Yonggang Jiang (Beihang University), Masayoshi Esashi (The World Premier International Research Center, Advanced Institute for Materials Research, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku University)

著者名(英語): Yonggang Jiang (Beihang University), Masayoshi Esashi (The World Premier International Research Center, Advanced Institute for Materials Research, Tohoku University), Takahito Ono (Graduate School of Engineering, Tohoku University)

キーワード: nanocantilever，piezoresistive，minimum detectable force

要約(英語): A modeling method for piezoresitive nanocantilevers using their geometrical parameters is described. The spring constant and the effective mass of piezoresistive nanocantilevers are formulated using theoretical and approximation equations, which shows a good agreement with the results of finite element analysis. The displacement sensitivity and minmum detectable force of piezoresistive nanocantilevers with non-uniform doping profiles are calculated by introducing a piezoresistive efficiency factor.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.131 No.7 （2011）

本誌掲載ページ: 270-271 p

原稿種別: 研究開発レター／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/131/7/131_7_270/_article/-char/ja/