An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2012/01/01

タイトル(英語): An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation

著者名: Satoshi Maruyama (Institute of Industrial Science, The University of Tokyo), Muneki Nakada (Institute of Industrial Science, The University of Tokyo), Makoto Mita (Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency), Takuya T

著者名(英語): Satoshi Maruyama (Institute of Industrial Science, The University of Tokyo), Muneki Nakada (Institute of Industrial Science, The University of Tokyo), Makoto Mita (Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency), Takuya Takahashi (Institute of Industrial Science, The University of Tokyo), Hiroyuki Fujita (Institute of Industrial Science, The University of Tokyo), Hiroshi Toshiyoshi (Research Center for Advanced Science and Technology, The University of Tokyo)

キーワード: Optical scanner，vertical comb，electrostatic actuator，equivalent circuit，pulse width modulation

要約(英語): An equivalent circuit model for the resonant-type vertical comb-driven optical MEMS (micro electro mechanical system) scanner has been developed based on the simple extension of the parallel-plate model. Both the electrostatic torque and the induction charge models are interpreted by using the equation-defined nonlinear dependent current source on the electrical circuit simulator platform. A systematic procedure has been investigated to fit the analytical model with the experimental results by using fitting parameters including the damping coefficient, the suspension width, and the comb gap. The developed simulation model has been used to verify a new control scheme to tune the scanner's oscillation amplitude in resonance by means of the pulse-width modulation of voltage at a given pulse height; the result indicates the effective use of digital electronics for the comb-driven optical scanner.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.132 No.1 （2012）

本誌掲載ページ: 2023/01/09 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/1/132_1_1/_article/-char/ja/