PFAフィルムを積層したエレクトレットコンデンサマイクロホンの作製と特性評価

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2012/01/01

タイトル(英語): Fabrication and Characteristic Evaluation of Electret Condensor Microphone with PFA Film Lamination

著者名: 蔭山 健介（埼玉大学），長島 秀明（埼玉大学）

著者名(英語): Kensuke Kageyama (Saitama University), Hideaki Nagashima (Saitama University)

キーワード: マイクロホン，エレクトレット，マイクロギャップ，共振周波数，PFAフィルム　　microphone，electret，microgap，resonance frequency，PFA films

要約(英語): Electret condenser microphones (ECM) with perfluoroalkoxy (PFA) film lamination (FilmECMs) were fabricated and the microgap layers were formed between laminated films in the gap of FilmECM to enhance the electric field in the gap and the resonance frequency. The average sensitivity from 1 to 10 kHz and the resonance frequency of a single degree of freedom system were measured for fabricated FilmECMs. The average sensitivity of the FilmECM was increased with the increase in the number of film lamination in the gap while the resonance frequency was decreased. Moreover, the average sensitivity of FilmECM improved further by the application of boron nitride (BN) agglomerates on films in the gap. As a results, one of the fabricated FilmECMs demonstrated －54.5 dB (0 dB = 1 V/Pa) for the average sensitivity. Furthermore the significant degradation of the sensitivity was not observed up to 50 kHz for any samples though the sensitivity rising, which might be caused by the diffraction from the edge of the test fixture, was observed at around 20 kHz. Hence, FilmECM should have a great potential for a wideband mircrophone or an ultrasonic sensor.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.132 No.1 （2012）

本誌掲載ページ: 2023/10/15 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/1/132_1_10/_article/-char/ja/