マイクロカンチレバーアレイを用いたフレキシブルデバイス用接点構造の特性評価

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2012/04/01

タイトル(英語): Characterization of Contact Structure for Woven Electronic Textile Using Conductive Polymer Micro-Cantilever Array

著者名: 山下 崇博（技術研究組合 BEANS研究所 Macro BEANSセンター），Khumpuang Sommawan（（独）産業技術総合研究所），三宅 晃司（技術研究組合 BEANS研究所 Macro BEANSセンター／（独）産業技術総合研究所），伊藤 寿浩（技術研究組合 BEANS研究所 Macro BEANSセンター／（独）産業技術総合研究所）

著者名(英語): Takahiro Yamashita (Macro BEANS Center, BEANS Laboratory), Sommawan Khumpuang (National Institute of Advanced Industrial Science and Technology), Koji Miyake (Macro BEANS Center, BEANS Laboratory/National Institute of Advanced Industrial Science and Technology), Toshihiro Itoh (Macro BEANS Center, BEANS Laboratory/National Institute of Advanced Industrial Science and Technology)

キーワード: 導電性ポリマー，電子テキスタイル，マイクロカンチレバーアレイ，ナノインプリント，リールツーリールプロセス　　conductive polymer，electronic textile，micro-cantilever array，nanoimprinting，reel-to-reel process

要約(英語): Conductive polymer coated micro-cantilever array made by reel-to-reel continuous fiber process as the electrical contact components for woven electronic textile was investigated. We report the novel cantilever releasing method using air injection and the results of patternable CYTOP and organic conductive polymer using nanoimprinting method. The conductive organic material used in this study is PEDOT:PSS (poly(3,4-ethylenedioxythiophene) poly(4-styrenesulfonate)). Micro-cantilever contact array is realized to compose the electrical circuit through the large area woven textile. The contact resistance of 480 Ω is hold on for over 500 times. Contact resistance measurements revealed that an electric current begins to flow with smaller contact force for PEDOT:PSS coated cantilever array structure than for PEDOT:PSS film structure. There is no appreciable wear on cantilever surface due to its movability after 103 cycles contact test with 0.5 N contact force. Based on these results, PEDOT:PSS coated micro-cantilever array have excellent potential as electrical contact components between weft and warp for woven electronic textile.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.132 No.4 （2012）

本誌掲載ページ: 66-70 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/4/132_4_66/_article/-char/ja/