高周波MEMSのためのルテニウム微小電極パターンの作製法

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2012/04/01

タイトル(英語): Fabrication Technology of Ruthenium Microelectrode Pattern for RF MEMS

著者名: 松村 武（情報通信研究機構 ワイヤレスネットワーク研究所 スマートワイヤレス研究室），江刺 正喜（東北大学原子分子材料科学高等研究機構），原田 博司（情報通信研究機構 ワイヤレスネットワーク研究所 スマートワイヤレス研究室），田中 秀治（東北大学大学院工学研究科ナノメカニクス専攻）

著者名(英語): Takeshi Matsumura (National Institute of Information and Communications Technology (NICT), Wireless Network Research Institute, Smart Wireless Laboratory), Masayoshi Esashi (Tohoku University, World Premier International Research Center, Advanced Institute for Materials Research), Hiroshi Harada (National Institute of Information and Communications Technology (NICT), Wireless Network Research Institute, Smart Wireless Laboratory), Shuji Tanaka (Tohoku University, Department of Nanomechanics)

キーワード: ルテニウム，エッチング，硝酸セリウム(IV)アンモニウム，オゾン，RF MEMS　　Ruthenium，Etching，Cerium (IV) ammonium nitrate，Ozone (O3)，RF MEMS

要約(英語): Ruthenium (Ru), which is one of noble metals, has been intensively considered as an electrode material of DRAM capacitors, since Ru has high oxidation resistance and high electrical conductivity even in the oxidized state. Furthermore, Ru is also expected to be used as an electrode material of acoustic devices, e.g. FBAR, because of its superior acoustic properties such as high Young's modulus and density. For such applications, a precise etching technique for Ru microelectrode patterns is required. Ru etching proceeds by producing volatile oxidized Ru (RuO4), and is possible using plasma with O2 or O2 plus halogenous gas, e.g. Cl2 and CF4. However, the plasma etching also attacks resist and/or an underlayer of Si, SiN etc. In this study, a wet etching process with cerium (IV) ammonium nitrate (CAN)-based etchant and a dry etching process with O3 gas were investigated as low-damage Ru etching processes. O3 gas etching is better for patterning Ru microelectrodes than CAN-based wet etching. For O3 gas etching, diluted HF pretreatment is effective to reduce side etching and to improve etching uniformity.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.132 No.4 （2012）

本誌掲載ページ: 71-76 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/4/132_4_71/_article/-char/ja/