ナノインプリントを用いた金属埋め込みポリマー微細周期構造体の作製

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2012/04/01

タイトル(英語): Fabrication of Metal Embedded Polymer Periodic Nanostructures by Nanoimprint Process

著者名: 小粥 教幸（光産業創成大学院大学 光産業創成研究科／ASTI（株） AMD推進室），杉村 竜（ASTI（株） AMD推進室），瀧口 義浩（光産業創成大学院大学 光産業創成研究科）

著者名(英語): Noriyuki Ogai (The Graduate School for the Creation of New Photonics Industries/ASTI CORPORATION AMD (Advanced Micromachining Devices) Promoting Office), Ryo Sugimura (ASTI CORPORATION AMD (Advanced Micromachining Devices) Promoting Office), Yoshihiro Takiguchi (The Graduate School for the Creation of New Photonics Industries)

キーワード: 金属埋め込み微細構造，斜め蒸着，ナノインプリント，3次元フォトニック結晶　　Metal embedded nanostructures，Oblique evaporation，Nanoimprint，Three dimensional photonic crystal (3DPC)

要約(英語): Many nano-application research have been conducted with development of nanoimprint technologies. In particular, metal or metal-polymer hybrid nanostructures have great potentials as nano-devices such as localized surface plasmon resonance (LSPR) devices, wire grid polarizer (WGP) and organic electronics. The metal embedded polymer periodic nanostructures are also expected as a control substrate to array nanoparticles at three dimensional photonic crystal (3DPC). In this study, we propose and demonstrate new fabrication process based on a combination technique of vacuum evaporation and nanoimprint as a fabrication method for the metal embedded nanostructures. As the result, the PMMA nanodot array (approximate 100 nm in diameter with 300 nm pitch) with gold round films embedded at their bottoms were fabricated successfully using this method. Application to 3DPC and other nanodevices of these nanostructures and fabrication process are described.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.132 No.4 （2012）

本誌掲載ページ: 91-95 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/4/132_4_91/_article/-char/ja/