Infrared Collecting Lens Having Millimeter-size Diameter Integrated with Si Photo Cell

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2012/05/01

タイトル(英語): Infrared Collecting Lens Having Millimeter-size Diameter Integrated with Si Photo Cell

著者名: Takuro Aonuma (Dept. of Advanced Science and Technology, Toyota Technological Institute), Shinya Kumagai (Dept. of Advanced Science and Technology, Toyota Technological Institute), Minoru Sasaki (Dept. of Advanced Science and Technology, Toyota Technologi

著者名(英語): Takuro Aonuma (Dept. of Advanced Science and Technology, Toyota Technological Institute), Shinya Kumagai (Dept. of Advanced Science and Technology, Toyota Technological Institute), Minoru Sasaki (Dept. of Advanced Science and Technology, Toyota Technological Institute)

キーワード: Photo cell，Infrared，Stacked layer，UV-curing，Large-size microlens

要約(英語): Infrared millimeter-size microlens is prepared using the photoresist reflow. The stacked resist layers are prepared repeating the UV curing of the resist patterns. This underlying pre-form assists the material movement of the photoresist in the reflow generating the convex spherical shape. The characteristics of the stacked resist layers and the reflowing is examined. Infrared imaging performance of 1617μm-diameter microlens is confirmed using the thermography. Si photo cell shows the power generation against the visible light. The combination with the photo cell costs the degraded image quality due to the shadowing of the partial infrared at the front side electrode.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.132 No.5 （2012）

本誌掲載ページ: 119-126 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/5/132_5_119/_article/-char/ja/