高温環境で用いるための雑音振動を利用した確率型MEMSセンサ―物理モデルを用いた設計と試作によるその検証―
高温環境で用いるための雑音振動を利用した確率型MEMSセンサ―物理モデルを用いた設計と試作によるその検証―
カテゴリ: 論文誌(論文単位)
グループ名: 【E】センサ・マイクロマシン部門
発行日: 2012/09/01
タイトル(英語): Stochastic MEMS Sensor Using White Noise Oscillation for High Temperature Environment―Design Based on Physical Model and Its Verification by Device Prototype―
著者名: 畠山 庸平(東北大学 大学院工学研究科),江刺 正喜(東北大学 原子分子材料科学高等研究機構),田中 秀治(東北大学 大学院工学研究科)
著者名(英語): Yohei Hatakeyama (Graduate School of Engineering, Tohoku University), Masayoshi Esashi (WPI Advanced Institute for Materials Research, Tohoku University), Shuji Tanaka (Graduate School of Engineering, Tohoku University)
キーワード: 確率型センサ,ホワイトノイズ,プルイン,高温環境,物理モデル Stochastic sensor,White noise,Pull-in,High temperature,Physical model
要約(英語): This paper describes a stochastic MEMS sensor, which will be used in low S/N environments like in high temperature plants. A mass which vibrates between two counter electrodes by white voltage noise is “pulled in” to either of the electrodes by the application of pulse voltage to the mass. The direction of the pull-in is determined stochastically, and the probability that the mass is “pulled in” to a particular side depends on mechanical strain applied to the sensor structure. The behavior of the stochastic MEMS sensor was simulated using a developed simulator based on a physical model. The stochastic MEMS sensor was prototyped on an SOI wafer and the probability was measured as a function of the bias voltage. This experimental result was compared with the simulated result. Both results agree well, confirming the validity of the developed simulator and the physical model.
本誌: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.132 No.9 (2012)
本誌掲載ページ: 261-268 p
原稿種別: 論文/日本語
電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/9/132_261/_article/-char/ja/
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