Optimization of Electrode Structure for a High-Frequency AT-cut Quartz Resonator Using FEM

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2012/09/01

タイトル(英語): Optimization of Electrode Structure for a High-Frequency AT-cut Quartz Resonator Using FEM

著者名: Jing Ji (The Graduate School of Information, Production and Systems, Waseda University), Hiroshi Oigawa (The Graduate School of Information, Production and Systems, Waseda University), Hsin Hui Chen (The Graduate School of Information, Production and Syst

著者名(英語): Jing Ji (The Graduate School of Information, Production and Systems, Waseda University), Hiroshi Oigawa (The Graduate School of Information, Production and Systems, Waseda University), Hsin Hui Chen (The Graduate School of Information, Production and Systems, Waseda University), Meng Zhao (The Graduate School of Information, Production and Systems, Waseda University), Toshitsugu Ueda (The Graduate School of Information, Production and Systems, Waseda University)

キーワード: finite element method，optimization，electrode

要約(英語): For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.132 No.9 （2012）

本誌掲載ページ: 275-281 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/132/9/132_275/_article/-char/ja/