Damping Characteristics of Quartz Tilt Sensor with Nonparallel Comb Electrode

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2013/02/01

タイトル(英語): Damping Characteristics of Quartz Tilt Sensor with Nonparallel Comb Electrode

著者名: Fusao Kohsaka (Graduate School of Information Production and Systems, Waseda University), Jinxing Liang (School of Instrument Science and Engineering, Southeast University), Toshitsugu Ueda (Graduate School of Information Production and Systems, Waseda Un

著者名(英語): Fusao Kohsaka (Graduate School of Information Production and Systems, Waseda University), Jinxing Liang (School of Instrument Science and Engineering, Southeast University), Toshitsugu Ueda (Graduate School of Information Production and Systems, Waseda University)

キーワード: damping，nonparallel electrode，comb electrode，quartz，tilt sensor

要約(英語): The dynamic behavior of microelectromechanical systems (MEMS) sensors is very important to their response performance. In particular, the damping effect of the fluid resistance in a minute gap determines a sensor's response characteristics. Quartz tilt sensors fabricated by anisotropic wet etching have nonparallel comb electrodes. The fluid damping phenomenon in the nonparallel electrode is generally evaluated by numerical analysis (the finite element method). However, many numerical analysis results are required to elucidate the qualitative features of physical phenomena. We evaluated the fluid damping of nonparallel electrodes analytically and experimentally verified the effectiveness of the analytical solution. This paper describes the theoretical damping analysis of nonparallel electrodes and the experimentally investigated damping characteristics of a quartz tilt sensor, and then discusses the analytical and experimental results.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.133 No.2 （2013）

本誌掲載ページ: 37-41 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/133/2/133_37/_article/-char/ja/