2D Asymmetric Silicon Micro-Mirror Fabricated with Anodic Bonding between an Ultra-thin Silicon Film by Laser Micro-Processing and a Glass Substrate

カテゴリ: 論文誌(論文単位)

グループ名: 【E】センサ・マイクロマシン部門

発行日: 2014/08/01

タイトル(英語): 2D Asymmetric Silicon Micro-Mirror Fabricated with Anodic Bonding between an Ultra-thin Silicon Film by Laser Micro-Processing and a Glass Substrate

著者名: Takaki Itoh (Industrial Technology Center of Wakayama Prefecture), Toshihide Kuriyama (Kinki University), Toshiyuki Nakaie (Hanwa Electronic Ind. Co., Ltd.), Jun Matsui (Hanwa Electronic Ind. Co., Ltd.), Yoshiaki Miyamoto (Hanwa Electronic Ind. Co., Ltd.)

著者名(英語): Takaki Itoh (Industrial Technology Center of Wakayama Prefecture), Toshihide Kuriyama (Kinki University), Toshiyuki Nakaie (Hanwa Electronic Ind. Co., Ltd.), Jun Matsui (Hanwa Electronic Ind. Co., Ltd.), Yoshiaki Miyamoto (Hanwa Electronic Ind. Co., Ltd.), Hiroshi Maeda (Industrial Technology Center of Wakayama Prefecture)

キーワード: asymmetric silicon micro-mirrors，anodic bonding，laser micro-processing，ultrathin silicon，SOI-MEMS

要約(英語): Asymmetric silicon micro-mirrors are fabricated by the anodic bonding of an ultra-thin silicon film on a glass substrate, followed by the fabrication of ultra-thin silicon microelectromechanical systems (MEMS) mirror structures by laser micro-processing. Laser micro-processing, which merges the direct laser fabrication of ultra-thin silicon and anodic bonding, is easier than the silicon-on-insulator-MEMS process. Typically, polished ultra-thin silicon warps under residual stress. However, a flat surface profile was achieved on the scanning mirror of the silicon micro-mirror by anodic bonding and uniform pressure application. By vibrating the asymmetric silicon micro-mirror with an external vibrating element, we obtained a horizontal operation of 118 Hz and a vertical operation of 11040 Hz at the resonance frequency. The Lissajous pattern was also projected on the screen using the horizontal and vertical operations.

本誌: 電気学会論文誌E（センサ・マイクロマシン部門誌） Vol.134 No.8 （2014）

本誌掲載ページ: 247-252 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejsmas/134/8/134_247/_article/-char/ja/